VLSI Technology

Course Description :
Lecture Series on VLSI Design by Dr.Nandita Dasgupta, Department of Electrical Engineering, IIT Madras. Introduction, BJT and MOSFET Fabrication, Crystal Structure of Si, Epitaxy, Molecular beam Epitaxy, Oxidation, Diffusion, Ion - Implantation Process, Lithography, Wet Chemical Etching, Dry Etching, Plasma Deposition Process, CMOS Technology and BICMOS Technology.

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