MEMS and Microsystems

Course Description :
Lecture Series on MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, IIT Kharagpur. Introduction, Evoluation of MEMS, Microsensors. MEMS Materials, Microelectronic Technology, Etch Stop Techniques, Fabrication of Micromachined Microstructure, Microstereolithography, MEMS Pressure and Flow Sensor, MEMS Gyro Sensor, MEMS for Space Application, Wafer Bonding, Packaging of MEMS, MEMS for Biomedical Applications (Bio-MEMS).

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